Handbook of Microlithography, Micromachining, and Microfabri ...
P. Rai-Choudhury
- 31 oktober 1999
- 9780819423788
Samenvatting:
The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
€ 49,57
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