Microsystems and Nanosystems - Levitation Micro-Systems

Kirill Poletkin

• 19 november 2020
• 9783030589080

Samenvatting:

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.