Handbook of Silicon Semiconductor Metrology

29 juni 2001
9781135554835

Samenvatting:

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay

€ 87,64

Bestel bij Bol.com >